In₂O₃- and SnO₂-Based Thin Film Ozone Sensors: Fundamentals

Figure 13

Influence of air humidity on response and recovery times () during ozone detection by SnO₂ thin film sensors (films deposited at = 520°C,  nm): 1 and 2: wet atmosphere (~35–40% RH); 3 and 4: dry atmosphere (~1-2% RH). Adapted with permission from [56]. Copyright 2007 Elsevier.