In<sub>2</sub>O<sub>3</sub>- and SnO<sub>2</sub>-Based Thin Film Ozone Sensors: Fundamentals

<div>Dependencies of response time during ozone detection (<svg height="16.0973pt" id="M185" style="vertical-align:-5.3006pt" version="1.1" viewbox="-0.0498162 -10.7967 71.2414 16.0973" width="71.2414pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M620 675H597C578 656 570 650 541 650H144C112 650 104 653 94 675H72C59 618 42 552 23 493L53 491C71 534 88 564 105 585C124 608 144 615 238 615H290L197 121C182 40 174 34 88 28L82 0H361L367 28C275 34 266 38 281 121L374 615H441C522 615 543 608 553 583C562 560 566 531 565 493L597 494C603 551 612 629 620 675Z" id="g113-85"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="637" vert-adv-y="637"></glyph.data></g><g transform="matrix(.0091,0,0,-0.0091,7.176,3.132)"><path d="M262 451C169 451 38 375 38 210C38 98 121 -12 261 -12C360 -12 481 64 481 227C481 351 386 451 262 451ZM249 414C337 414 385 320 385 204C385 70 333 25 272 25C189 25 134 117 134 241C134 355 189 414 249 414Z" id="g58-109"></path><glyph.data ascent="1007" descent="-369" horiz-adv-x="519" vert-adv-y="519"></glyph.data></g><g transform="matrix(.0091,0,0,-0.0091,11.798,3.132)"><path d="M173 382V461C125 442 68 425 25 418V390C88 382 92 382 92 317V-127C92 -191 84 -199 18 -204V-235H259V-204C180 -196 173 -192 173 -120V7C188 -1 212 -11 243 -12C375 12 495 109 495 261C495 361 427 451 316 451C303 451 283 446 266 435L173 382ZM173 345C200 365 243 388 274 388C346 388 409 329 409 222C409 111 353 40 266 40C231 40 196 56 173 79V345Z" id="g58-110"></path><glyph.data ascent="1007" descent="-369" horiz-adv-x="534" vert-adv-y="534"></glyph.data></g><g transform="matrix(.0091,0,0,-0.0091,16.74,3.132)"><path d="M384 109C349 76 310 59 268 59C197 59 123 113 120 245C240 248 367 259 384 262C403 266 407 275 407 296C407 376 338 451 254 451H253C201 451 148 425 105 378C65 334 39 272 39 203C39 88 112 -12 235 -12C266 -12 339 5 402 84L384 109ZM230 411C285 411 319 365 319 313C319 298 313 293 294 293C236 291 180 290 125 290C141 370 185 411 230 411Z" id="g58-99"></path><glyph.data ascent="1007" descent="-369" horiz-adv-x="434" vert-adv-y="434"></glyph.data></g><g transform="matrix(.0091,0,0,-0.0091,20.689,3.132)"><path d="M185 344V453C137 433 92 421 41 413V386C100 378 104 375 104 310V106C104 41 97 35 33 30V0H268V30C190 35 185 41 185 107V283C206 340 240 371 267 371C282 371 296 364 310 351C316 344 325 343 336 348C357 357 369 378 369 399C369 424 345 451 310 451C262 451 219 397 187 344H185Z" id="g58-112"></path><glyph.data ascent="1007" descent="-369" horiz-adv-x="380" vert-adv-y="380"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,28.341,0)"><path d="M548 311L516 323C497 274 452 240 400 240C372 240 342 260 316 278C277 305 235 330 188 330C116 330 66 268 40 199L72 187C91 236 136 270 188 270C216 270 246 250 272 232C311 205 353 180 400 180C472 180 522 242 548 311Z" id="g117-131"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="587" vert-adv-y="587"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,39.604,0)"><path d="M412 140C382 77 369 73 315 73H129L270 222C362 320 402 379 402 466C402 571 322 635 234 635C177 635 130 609 99 576L42 495L64 475C90 514 133 568 201 568C274 568 318 519 318 435C318 349 255 267 193 193C144 135 87 78 32 23V0H405C417 45 427 89 440 131L412 140Z" id="g113-51"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="480" vert-adv-y="480"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,45.844,0)"><path d="M447 623H65C61 580 56 530 47 475H76C100 541 106 550 172 550H388C308 376 196 170 91 -1L98 -12L172 -2C268 204 360 408 455 611L447 623Z" id="g113-56"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="480" vert-adv-y="480"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,52.086,0)"><path d="M241 635C89 635 35 457 35 312C35 153 89 -12 240 -12C390 -12 443 166 443 312C443 466 390 635 241 635ZM238 602C329 602 354 454 354 312C354 172 330 22 240 22C152 22 124 173 124 313S148 602 238 602Z" id="g113-49"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="480" vert-adv-y="480"></glyph.data></g><g transform="matrix(.0091,0,0,-0.0091,58.394,-5.741)"><path d="M339 262C339 340 273 403 193 403S48 340 48 262S113 121 193 121S339 184 339 262ZM283 262C283 210 242 168 193 168S104 210 104 262S144 356 193 356S283 314 283 262Z" id="g54-73"></path><glyph.data ascent="3443" descent="-2856" horiz-adv-x="385" vert-adv-y="385"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,62.409,0)"><path d="M614 175C564 76 510 21 408 21C256 21 146 149 146 336C146 488 235 629 402 629C510 629 570 586 597 480L626 488C620 541 614 582 606 638C578 643 510 665 429 665C206 665 44 527 44 316C44 157 153 -15 402 -15C474 -15 558 5 586 11C604 45 629 119 643 165L614 175Z" id="g121-65"></path><glyph.data ascent="989" descent="-360" horiz-adv-x="665" vert-adv-y="665"></glyph.data></g></svg>) on the grain size of In<sub>2</sub>O<sub>3</sub> films deposited from 0.2 M InCl<sub>3</sub>-water solution. Reprinted with permission from [<a href="/journals/js/2016/3816094/#B43">43</a>]. Copyright 2004 Elsevier.</div>

Journal of Sensors

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Figure 25

Figure 25: In<sub>2</sub>O<sub>3</sub>- and SnO<sub>2</sub>-Based Thin Film Ozone Sensors: Fundamentals 

Journal of Sensors

In2O3- and SnO2-Based Thin Film Ozone Sensors: Fundamentals

Figure 25

In₂O₃- and SnO₂-Based Thin Film Ozone Sensors: Fundamentals