In₂O₃- and SnO₂-Based Thin Film Ozone Sensors: Fundamentals

Figure 26

Influence of the film thickness on the activation energies of transient characteristics during ozone detection: (1) response; (2 and 3) recovery; (1 and 2) dry atmospheres (RH ~ 1–3%); (3) wet atmosphere (RH ~ 45–60%); = 475°C. Reprinted with permission from [54]. Copyright 2007 Elsevier.