In<sub>2</sub>O<sub>3</sub>- and SnO<sub>2</sub>-Based Thin Film Ozone Sensors: Fundamentals

<div>Film thickness influence on temperature dependences of In<sub>2</sub>O<sub>3</sub> response to ozone (1 ppm). <svg height="14.45pt" id="M19" style="vertical-align:-5.48788pt" version="1.1" viewbox="-0.0498162 -8.96212 20.4787 14.45" width="20.4787pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M620 675H597C578 656 570 650 541 650H144C112 650 104 653 94 675H72C59 618 42 552 23 493L53 491C71 534 88 564 105 585C124 608 144 615 238 615H290L197 121C182 40 174 34 88 28L82 0H361L367 28C275 34 266 38 281 121L374 615H441C522 615 543 608 553 583C562 560 566 531 565 493L597 494C603 551 612 629 620 675Z" id="g113-85"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="637" vert-adv-y="637"></glyph.data></g><g transform="matrix(.0091,0,0,-0.0091,7.176,3.132)"><path d="M173 382V461C125 442 68 425 25 418V390C88 382 92 382 92 317V-127C92 -191 84 -199 18 -204V-235H259V-204C180 -196 173 -192 173 -120V7C188 -1 212 -11 243 -12C375 12 495 109 495 261C495 361 427 451 316 451C303 451 283 446 266 435L173 382ZM173 345C200 365 243 388 274 388C346 388 409 329 409 222C409 111 353 40 266 40C231 40 196 56 173 79V345Z" id="g58-110"></path><glyph.data ascent="1007" descent="-369" horiz-adv-x="534" vert-adv-y="534"></glyph.data></g><g transform="matrix(.0091,0,0,-0.0091,11.871,3.132)"><path d="M488 439H302V409C359 401 366 390 354 354C333 287 289 177 262 107L171 356C158 391 163 402 210 409L209 439H3V409C59 401 68 388 90 336C119 267 164 144 204 31C211 16 211 0 206 -15C202 -27 195 -48 176 -81C153 -124 134 -146 102 -166C85 -177 77 -187 77 -203C77 -228 107 -253 136 -253C151 -253 164 -248 169 -228C185 -175 203 -120 273 41C342 204 375 284 399 337C425 392 435 401 488 409V439Z" id="g58-119"></path><glyph.data ascent="1007" descent="-369" horiz-adv-x="470" vert-adv-y="470"></glyph.data></g><g transform="matrix(.0091,0,0,-0.0091,16.349,3.132)"><path d="M185 344V453C137 433 92 421 41 413V386C100 378 104 375 104 310V106C104 41 97 35 33 30V0H268V30C190 35 185 41 185 107V283C206 340 240 371 267 371C282 371 296 364 310 351C316 344 325 343 336 348C357 357 369 378 369 399C369 424 345 451 310 451C262 451 219 397 187 344H185Z" id="g58-112"></path><glyph.data ascent="1007" descent="-369" horiz-adv-x="380" vert-adv-y="380"></glyph.data></g></svg> = 475°C. Data extracted from [<a href="/journals/js/2016/3816094/#B43">43</a>, <a href="/journals/js/2016/3816094/#B44">44</a>, <a href="/journals/js/2016/3816094/#B92">90</a>].</div>

Journal of Sensors

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Figure 5

Figure 5: In<sub>2</sub>O<sub>3</sub>- and SnO<sub>2</sub>-Based Thin Film Ozone Sensors: Fundamentals 

Journal of Sensors

In2O3- and SnO2-Based Thin Film Ozone Sensors: Fundamentals

Figure 5

In₂O₃- and SnO₂-Based Thin Film Ozone Sensors: Fundamentals