Lithography-Free, Low-Cost Method for Improving Photodiode Performance by Etching Silicon Nanocones as Antireflection Layer

Figure 3

(a) Diffusive reflection spectra of untreated PD (red) and treated black PD (black). (b) External quantum efficiency of untreated PD (red) and treated black PD (black). (c) Responsivity of untreated PD (red) and treated black PD (black). Shaded area is standard deviation.

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(b)

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