Review Article
Accelerometer Sensor Specifications to Predict Hydrocarbon Using Passive Seismic Technique
Table 1
A Comparative analysis on the characterization and noise analysis of MEMS device [
9].
| Paper | Device or structure | Focus | Characterization |
| Gabrielson [10] | Accelerometers, pressure sensors, capacitive microphones | Mechanical-thermal noise | Theory |
| Djuric [11] | Accelerometers, infrared thermal detector, microbeams | Several mechanisms | Theory |
| Djuric et al. [12] | Microcantilevers and microresonators | Several mechanisms | Theory and computations |
| Greiner and Korvink [13] | Micro bars | Mechanical noise | Theory |
| Vig and Kim [14] | Resonators (microbeams) | Several mechanisms | Theory and computations |
| Leland [15] | Gyroscopes | Mechanical-thermal noise | Theory |
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