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Journal of Sensors
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2016
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Article
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Fig 3
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Research Article
Modal Analysis of a Single-Structure Multiaxis MEMS Gyroscope
Figure 3
Required resonant four modes of the proposed design. (a) Driving mode, (b)
-sensing mode, (c)
-sensing mode, and (d)
-sensing mode.
(a)
(b)
(c)
(d)