Modal Analysis of a Single-Structure Multiaxis MEMS Gyroscope

Figure 4

Stress effects at the spring ends of coupling springs. (a) Design with Z-shaped spring in the coupling spring. The stress effect is reduced at the spring ends attached to the driving mass. (b) Design without the Z-shaped beam in the coupling spring. A large stress effect occurs when von Mises stress has been applied during the drive mode.

(a)

(b)