Modal Analysis of a Single-Structure Multiaxis MEMS Gyroscope

<div>Design with Z-shaped beam in the coupling spring (<svg height="8.8423pt" id="M37" style="vertical-align:-0.2064009pt" version="1.1" viewbox="-0.0498162 -8.6359 12.522 8.8423" width="12.522pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M449 634C442 637 425 643 405 650C376 660 341 666 307 666C181 666 98 590 98 485C98 400 170 343 215 310L246 288C307 243 343 204 343 147C343 67 291 18 219 18C104 18 61 124 51 202L23 199C28 124 27 71 27 47C47 22 122 -16 204 -16C324 -16 428 60 428 174C428 256 379 309 307 360L276 382C223 419 179 455 179 516C179 576 221 632 293 632C379 632 410 564 418 487L448 490C446 536 446 592 449 634Z" id="g113-84"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="472" vert-adv-y="472"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,6.136,0)"><path d="M384 0V27C293 34 287 42 287 114V635C232 613 172 594 109 583V559L157 557C201 555 205 550 205 499V114C205 42 199 34 109 27V0H384Z" id="g113-50"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="480" vert-adv-y="480"></glyph.data></g></svg>). Final required mode frequency is 13515 Hz while the unwanted mode (next to the final required mode) frequency is 15587 Hz, which has a difference of 2072 Hz.</div>

Journal of Sensors

Modal Analysis of a Single-Structure Multiaxis MEMS Gyroscope

Figure 5