Modal Analysis of a Single-Structure Multiaxis MEMS Gyroscope

<div>Design without Z-shaped beam in coupling spring (<svg height="8.8423pt" id="M38" style="vertical-align:-0.2064009pt" version="1.1" viewbox="-0.0498162 -8.6359 12.522 8.8423" width="12.522pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M449 634C442 637 425 643 405 650C376 660 341 666 307 666C181 666 98 590 98 485C98 400 170 343 215 310L246 288C307 243 343 204 343 147C343 67 291 18 219 18C104 18 61 124 51 202L23 199C28 124 27 71 27 47C47 22 122 -16 204 -16C324 -16 428 60 428 174C428 256 379 309 307 360L276 382C223 419 179 455 179 516C179 576 221 632 293 632C379 632 410 564 418 487L448 490C446 536 446 592 449 634Z" id="g113-84"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="472" vert-adv-y="472"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,6.136,0)"><path d="M412 140C382 77 369 73 315 73H129L270 222C362 320 402 379 402 466C402 571 322 635 234 635C177 635 130 609 99 576L42 495L64 475C90 514 133 568 201 568C274 568 318 519 318 435C318 349 255 267 193 193C144 135 87 78 32 23V0H405C417 45 427 89 440 131L412 140Z" id="g113-51"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="480" vert-adv-y="480"></glyph.data></g></svg>). Final required mode frequency is 13536 Hz while the unwanted mode (next to the final required mode) frequency is 14361 Hz, which has a difference of 825 Hz.</div>

Journal of Sensors

Modal Analysis of a Single-Structure Multiaxis MEMS Gyroscope

Figure 6