Research Article
Modal Analysis of a Single-Structure Multiaxis MEMS Gyroscope
Table 1
Electrical parameters of the proposed design.
| | Types | Notation | Capacitance |
| | Driving | | 758 fF | | Drive sense | | 503 fF | | Coriolis sense -gyro | | 794 fF | | Coriolis sense -gyro | | 794 fF | | Coriolis sense -gyro | | 521 fF |
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