A Two-Dimensional CMUT Linear Array for Underwater Applications: Directivity Analysis and Design Optimization

<table class="table-group" id="tab1"><tr><td><table class="table"><tr><td class="thead-hr" colspan="5"><hr/></td></tr><tr class="thead"><td class="align_left"> </td><td class="align_center">Poly-Si</td><td class="align_center"><span style="width: 25.0942ptpx;"><svg height="12.0575pt" id="M11" style="vertical-align:-3.2911pt" version="1.1" viewbox="-0.0498162 -8.7664 25.0942 12.0575" width="25.0942pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M409 504C401 567 396 607 392 642C354 654 312 665 266 665C137 665 60 583 60 487C60 374 161 325 225 290C300 250 355 215 355 141C355 68 311 21 235 21C131 21 86 122 71 183L41 176C48 128 61 42 68 21C78 16 93 8 118 0C142 -7 175 -15 216 -15C349 -15 438 69 438 174C438 287 344 333 265 374C186 414 138 449 138 522C138 576 172 631 249 631C336 631 363 562 380 499L409 504Z" id="g121-81"></path><glyph.data ascent="989" descent="-360" horiz-adv-x="474" vert-adv-y="474"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,6.084,0)"><path d="M135 536C164 536 186 560 186 587C186 617 164 639 136 639C109 639 85 617 85 587C85 560 109 536 135 536ZM252 0V26C188 32 181 38 181 106V451C138 433 90 420 39 412V388C99 379 102 374 102 312V106C102 38 95 32 32 26V0H252Z" id="g121-103"></path><glyph.data ascent="989" descent="-360" horiz-adv-x="268" vert-adv-y="268"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,9.568,0)"><path d="M719 650H483V622C553 619 576 606 581 560C585 532 588 487 588 394V148H585L167 650H20V622C67 618 88 610 109 585C127 562 129 557 129 484V264C129 173 126 124 123 93C118 44 92 31 35 28V0H272V28C204 32 181 44 176 95C173 124 170 172 170 264V515H172L598 -9H629V394C629 487 631 532 635 563C639 606 663 619 719 622V650Z" id="g121-76"></path><glyph.data ascent="989" descent="-360" horiz-adv-x="743" vert-adv-y="743"></glyph.data></g><g transform="matrix(.0091,0,0,-0.0091,19.299,3.132)"><path d="M545 403C545 425 527 451 498 451C448 451 400 404 312 286L290 341C262 412 246 451 219 451C182 451 138 404 92 345L112 323C152 368 169 378 181 378C192 378 201 359 216 321L257 214C184 115 142 69 113 69C102 69 93 73 88 79S78 89 68 89C47 89 24 61 24 40C24 8 49 -12 75 -12C125 -12 175 31 271 175L312 64C330 15 357 -12 382 -12C421 -12 475 35 515 98L496 121C466 88 439 62 420 62C402 62 384 92 363 147L325 247C349 280 374 309 397 333C422 361 446 381 462 381C471 381 481 374 488 366C493 360 499 357 505 357C521 357 545 380 545 403Z" id="g50-121"></path><glyph.data ascent="3443" descent="-2856" horiz-adv-x="569" vert-adv-y="569"></glyph.data></g></svg></span></td><td class="align_center">SiO<sub>2</sub></td><td class="align_center">Water</td></tr><tr><td class="thead-hr" colspan="5"><hr/></td></tr><tr><td class="align_left">Young’s modulus/GPa</td><td class="align_center">160</td><td class="align_center">320</td><td class="align_center">70</td><td class="align_center">—</td></tr><tr><td class="align_left">Density/g/cm<sup>3</sup></td><td class="align_center">2.32</td><td class="align_center">3.27</td><td class="align_center">2.2</td><td class="align_center">0.9982</td></tr><tr><td class="align_left">Poisson’s ratio</td><td class="align_center">0.22</td><td class="align_center">0.26</td><td class="align_center">0.17</td><td class="align_center">—</td></tr><tr><td class="align_left">Relative permittivity</td><td class="align_center">4.5</td><td class="align_center">5.7</td><td class="align_center">4.2</td><td class="align_center">—</td></tr><tr class="table-tr"><td colspan="5"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Journal of Sensors

tab1

Table 1

Table 1: A Two-Dimensional CMUT Linear Array for Underwater Applications: Directivity Analysis and Design Optimization 