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Journal of Sensors
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2016
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Article
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Tab 1
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Research Article
A Distance Compensated Approach Used in Wireless Passive Pressure Sensor Readout System for High Temperature Application
Table 1
Geometrical parameters of the capacitor.
Parameter
Characteristic
Value
Radius of the round electrode plate
4 mm
Cavity thickness
100
m
Thickness of the sensitive membrane
100
m