EGFET pH Sensor Performance Dependence on Sputtered TiO<sub>2</sub> Sensing Membrane Deposition Temperature

<div>Raman spectrum of TiO<sub>2</sub> thin films deposited at (a) room temperature and (b) 200°C.</div>

Journal of Sensors

Figure 4: EGFET pH Sensor Performance Dependence on Sputtered TiO<sub>2</sub> Sensing Membrane Deposition Temperature 