Journal of Sensors / 2016 / Article / Fig 5

Research Article

EGFET pH Sensor Performance Dependence on Sputtered TiO2 Sensing Membrane Deposition Temperature

Figure 5

Transfer characteristics () curve of TiO2 thin films deposited at (a) room temperature and (b) 200°C at pH of 1.8, 4, 6.2, 7, 8.1, 10, and 12. The inset shows the pH dependence of the reference voltage () plot. Sensitivity and linearity of the sensor were calculated from this plot.

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