EGFET pH Sensor Performance Dependence on Sputtered TiO₂ Sensing Membrane Deposition Temperature

Figure 5

Transfer characteristics () curve of TiO₂ thin films deposited at (a) room temperature and (b) 200°C at pH of 1.8, 4, 6.2, 7, 8.1, 10, and 12. The inset shows the pH dependence of the reference voltage () plot. Sensitivity and linearity of the sensor were calculated from this plot.

(a)  

(b)