Journal of Sensors / 2016 / Article / Fig 7

Research Article

EGFET pH Sensor Performance Dependence on Sputtered TiO2 Sensing Membrane Deposition Temperature

Figure 7

Hysteresis characteristics for pH loop of 7 4 7 10 7 and 7 10 7 4 7 of TiO2 thin films deposited at (a) room temperature and (b) 200°C. The hysteresis widths are shown in (c) and (d) for TiO2 thin films deposited at room temperature and 200°C, respectively.
(a)
(b)
(c)
(d)

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