EGFET pH Sensor Performance Dependence on Sputtered TiO<sub>2</sub> Sensing Membrane Deposition Temperature

<table class="table-group" id="tab2"><tr><td><table class="table"><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr class="thead"><td class="align_left">Deposition temperature (°C)</td><td class="align_center">Sensitivity (mV/pH)</td><td class="align_center">Linearity</td></tr><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr><td class="align_left">Room temperature</td><td class="align_center">59.89</td><td class="align_center">0.93503</td></tr><tr><td class="align_left">200</td><td class="align_center">37.60</td><td class="align_center">0.95132</td></tr><tr class="table-tr"><td colspan="3"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Sensitivity and linearity of TiO<sub>2</sub> thin films.

Journal of Sensors

tab2

Table 2

Table 2: EGFET pH Sensor Performance Dependence on Sputtered TiO<sub>2</sub> Sensing Membrane Deposition Temperature 

Journal of Sensors

EGFET pH Sensor Performance Dependence on Sputtered TiO2 Sensing Membrane Deposition Temperature

Table 2

EGFET pH Sensor Performance Dependence on Sputtered TiO₂ Sensing Membrane Deposition Temperature