Journal of Sensors / 2016 / Article / Tab 2

Research Article

EGFET pH Sensor Performance Dependence on Sputtered TiO2 Sensing Membrane Deposition Temperature

Table 2

Sensitivity and linearity of TiO2 thin films.

Deposition temperature (°C)Sensitivity (mV/pH)Linearity

Room temperature59.890.93503
20037.600.95132

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