Review Article

A Review of Implementing ADC in RFID Sensor

Figure 12

Schematic drawing of the CNT gas microsensor. Oxidized silicon substrates (1), gold patterned electrodes (2), wire bonding connections (3), and the gap with DEP deposited carbon nanotubes (4) compose the device. The inset shows a closer view of the CNTs deposited between the gold electrodes [22].