Review Article
A Review of Implementing ADC in RFID Sensor
Figure 12
Schematic drawing of the CNT gas microsensor. Oxidized silicon substrates (1), gold patterned electrodes (2), wire bonding connections (3), and the gap with DEP deposited carbon nanotubes (4) compose the device. The inset shows a closer view of the CNTs deposited between the gold electrodes [22].