Fabrication of Si<sub>3</sub>N<sub>4</sub>-Based Artificial Basilar Membrane with ZnO Nanopillar Using MEMS Process

<div>Flow chart of Si<sub>3</sub>N<sub>4</sub> ABM fabrication process.</div>

Journal of Sensors

Figure 2: Fabrication of Si<sub>3</sub>N<sub>4</sub>-Based Artificial Basilar Membrane with ZnO Nanopillar Using MEMS Process 