Fabrication of Si<sub>3</sub>N<sub>4</sub>-Based Artificial Basilar Membrane with ZnO Nanopillar Using MEMS Process

<div>Fabrication process of bottom ABM substrate.</div>

Journal of Sensors

Figure 3: Fabrication of Si<sub>3</sub>N<sub>4</sub>-Based Artificial Basilar Membrane with ZnO Nanopillar Using MEMS Process 