Fabrication of Si<sub>3</sub>N<sub>4</sub>-Based Artificial Basilar Membrane with ZnO Nanopillar Using MEMS Process

<div>Growth of ZnO nanopillar on the bottom ABM substrate.</div>

Journal of Sensors

Figure 5: Fabrication of Si<sub>3</sub>N<sub>4</sub>-Based Artificial Basilar Membrane with ZnO Nanopillar Using MEMS Process 