Fabrication of Si₃N₄-Based Artificial Basilar Membrane with ZnO Nanopillar Using MEMS Process

Figure 7

Layout of bonding pad: (a) unmarked bonding pad with ABM pattern; (b) narked (blue color) bonding pad with ABM pattern; and (c) images of the Si₃N₄ ABM: left (top wafer) and right (bottom wafer).

(a)

(b)

(c)