The Differential Method for Force Measurement Based on Electrostatic Force

<table class="table-group" id="tab3"><tr><td><table class="table"><tr><td class="thead-hr" colspan="2"><hr/></td></tr><tr class="thead"><td class="align_left">Uncertainty sources</td><td class="align_center">Contribution (%)</td></tr><tr><td class="thead-hr" colspan="2"><hr/></td></tr><tr><td class="align_left">Voltage</td><td class="align_center"><span style="width: 63.3087ptpx;"><svg height="22.7523pt" id="M70" style="vertical-align:-7.0179pt" version="1.1" viewbox="-0.0498162 -15.7344 63.3087 22.7523" width="63.3087pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,-.705)"><path d="M772 1098H727L517 -348H515L294 324L133 259L147 224L245 263L524 -588H526L772 1098Z" id="g119-122"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="764" vert-adv-y="764"></glyph.data></g><rect height="0.65243" width="52.9919" x="10.2172" y="-15.0321"></rect><g transform="matrix(.013,0,0,-0.013,10.217,0)"><path d="M456 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horiz-adv-x="412" vert-adv-y="412"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,31.08,0)"><path d="M456 178V225H360V632H320C217 496 115 347 20 206V178H280V106C280 40 276 34 189 27V0H445V27C364 34 360 39 360 106V178H456ZM280 225H82C149 335 214 431 278 520H280V225Z" id="g113-53"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="480" vert-adv-y="480"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,37.32,0)"><path d="M241 635C89 635 35 457 35 312C35 153 89 -12 240 -12C390 -12 443 166 443 312C443 466 390 635 241 635ZM238 602C329 602 354 454 354 312C354 172 330 22 240 22C152 22 124 173 124 313S148 602 238 602Z" id="g113-49"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="480" vert-adv-y="480"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,43.56,0)"><path d="M137 343C167 482 260 545 321 574C357 591 397 603 429 609L423 641C382 634 335 622 295 608C189 570 37 457 37 238C37 84 125 -12 242 -12C362 -12 447 89 447 209C447 311 374 393 267 393C247 393 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502C389 578 329 635 238 635H237C184 635 137 610 109 578L64 515L88 493C112 529 154 573 208 573S303 542 303 482C303 409 233 370 141 341L149 308C165 313 190 319 215 319C272 319 341 283 341 193C342 98 292 43 222 43C163 43 122 72 96 94C88 101 79 100 70 94C61 87 47 73 46 60C44 47 48 37 62 23C76 10 118 -12 165 -12C238 -12 430 62 430 223C430 297 379 359 290 375V377Z" id="g50-52"></path><glyph.data ascent="3443" descent="-2856" horiz-adv-x="487" vert-adv-y="487"></glyph.data></g></svg></span></td></tr><tr><td class="align_left">Capacitance gradient</td><td class="align_center">0.06</td></tr><tr><td class="align_left">Lase interferometer</td><td class="align_center"><span style="width: 20.1164ptpx;"><svg height="12.7178pt" id="M71" style="vertical-align:-3.42947pt" version="1.1" viewbox="-0.0498162 -9.28833 20.1164 12.7178" width="20.1164pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M285 378C315 398 338 416 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-236 60 -261 93 -261C122 -261 161 -247 207 -200C268 -138 300 -71 337 94C365 220 376 277 394 387L501 399L521 430H401C432 623 464 665 501 665C524 665 544 651 567 627C577 617 583 618 592 625C601 631 619 651 619 670Z" id="g113-103"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="642" vert-adv-y="642"></glyph.data></g></svg></span></td></tr><tr><td class="align_left">Repeatable</td><td class="align_center">0.9</td></tr><tr><td class="align_left">Combined</td><td class="align_center">2</td></tr><tr class="table-tr"><td colspan="2"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Journal of Sensors

tab3

Table 3

Table 3: The Differential Method for Force Measurement Based on Electrostatic Force 