Research Article
Principle Research on a Novel Piezoelectric 12-DOF Force/Acceleration Sensor
Table 3
Crossing coupling simulation results of static sensitivity in 6-axis acceleration directions under an external force.
| Load category | Crossing coupling | Ax | Ay | Az | αx | αy | αz |
| Fx | 0.0111% | 0.0002% | −0.0001% | 0.0009% | −0.0030% | 0 | Fy | −0.0004% | 0.0110% | −0.0001% | 0.0032% | 0.0006% | 0 | Fz | 0 | −0.0001% | −0.0013% | 0.0001% | −0.0001% | −0.0008% | Mx | 0.0002% | −0.0106% | 0 | −0.0016% | −0.0006% | 0 | My | 0.0107% | 0 | 0 | 0.0008% | −0.0014% | 0 | Mz | 0 | 0 | 0 | 0 | 0 | −0.0001% |
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