Modeling of a Piezoelectric MEMS Micropump Dedicated to Insulin Delivery and Experimental Validation Using Integrated Pressure Sensors: Application to Partial Occlusion Management

Table 2

Numerical values of the different parameters used to validate the model as shown in Figures 2 and 3.

Network element	Description	Value
(a)	Reservoir pressure	0 Pa
(b)	Particle filter resistance	0 Pa⋅s/m^3
(c)	Inlet valve stiffness	1.05 kN/m
(d)	Fluidic resistance between inlet valve and pumping chamber	Pa⋅s/m^3
(e)	Pumping membrane compliance dV/dP	0.0043 nl/mbar
(f)	Piezoelectric actuator force factor	0.082 N/V
	Max piezo voltage	200 V
	Membrane stiffness	63 kN/m
(g)	Inner sensor compliance dV/dP	0.00302 nl/mbar
	Fluidic resistance of inner detector	Pa⋅s/m^3
(h)	Outlet valve stiffness	20.8 kN/m
	Outer valve compliance dV/dP	0.00256 nl/mbar
(i)	Fluidic resistance of outer detector	Pa⋅s/m^3
(j)	Backpressure	0 Pa