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Journal of Sensors
Volume 2017, Article ID 4198485, 6 pages
https://doi.org/10.1155/2017/4198485
Research Article

Fabricating 90 nm Resolution Structures in Sol-Gel Silica Optical Waveguides for Biosensor Applications

School of System Engineering, Kochi University of Technology, 185 Miyanoguchi, Tosayamada, Kami, Kochi 782-8502, Japan

Correspondence should be addressed to Yasufumi Enami; pj.ca.hcet-ihcok@imufusay.imane

Received 10 February 2017; Accepted 14 March 2017; Published 23 April 2017

Academic Editor: Zubair Ahmad

Copyright © 2017 Yasufumi Enami. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

Bragg grating structure in a sol-gel silica waveguide is fabricated on the basis of nanoimprint lithography for biophotonic applications. The process realizes nonstandardized lithography in sol-gel silica at a high resolution for a relatively large area in the range of several micrometers with a resolution in the order of several nanometers. Here we demonstrate structures of 250 and 90 nm resolutions in a sol-gel silica optical waveguide for a large area that is not optimized to date. Bragg grating of a 250 nm periodic structure is realized for a 1 mm long area.