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Journal of Sensors
Volume 2017, Article ID 4198485, 6 pages
Research Article

Fabricating 90 nm Resolution Structures in Sol-Gel Silica Optical Waveguides for Biosensor Applications

School of System Engineering, Kochi University of Technology, 185 Miyanoguchi, Tosayamada, Kami, Kochi 782-8502, Japan

Correspondence should be addressed to Yasufumi Enami;

Received 10 February 2017; Accepted 14 March 2017; Published 23 April 2017

Academic Editor: Zubair Ahmad

Copyright © 2017 Yasufumi Enami. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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