Four-Terminal Square Piezoresistive Sensors for MEMS Pressure Sensing

<table class="figure-group"><tr class="fig-image" id="a"><td><object data="https://static.hindawi.com/articles/js/volume-2017/6954875/figures/6954875.fig.001a.svgz" name="6954875.fig.001a" type="image/svg+xml"></object></td></tr><tr class="fig-caption"><td><b>(a) </b>The traditional van der Pauw (VDP) sensor measurement</td></tr><tr class="fig-image" id="b"><td><object data="https://static.hindawi.com/articles/js/volume-2017/6954875/figures/6954875.fig.001b.svgz" name="6954875.fig.001b" type="image/svg+xml"></object></td></tr><tr class="fig-caption"><td><b>(b) </b>Diagonal sensor measurement</td></tr></table>

<div>Measurement schemes for four-terminal sensors.</div>

Journal of Sensors

fig1

Figure 1

Figure 1: Four-Terminal Square Piezoresistive Sensors for MEMS Pressure Sensing 