Four-Terminal Square Piezoresistive Sensors for MEMS Pressure Sensing

Table 1

Anisotropic and piezoresistive coefficients used in simulation.

Anisotropic		Piezoresistive
Coefficient	MPa	Coefficient	Pa^−1
	16.57 × 10^4		66 × 10^−12
	6.39 × 10^4		−11 × 10^−12
	7.96 × 10^4		1380 × 10^−12