Four-Terminal Square Piezoresistive Sensors for MEMS Pressure Sensing

Table 2

Comparison between transverse voltage and VDP adjacent voltages.

Stress (MPa)				or
0	0.11569	0.11569	0.00000	0.00000
10	0.11809	0.11335	0.00474	0.004736
20	0.12052	0.11105	0.00947	0.009473
30	0.12318	0.10828	0.01490	0.01495
40	0.12600	0.10606	0.01994	0.019943
50	0.12867	0.10375	0.02492	0.024930
60	0.13138	0.10146	0.02992	0.029920
70	0.13412	0.09921	0.03491	0.034911