Fabrication and Characterization of High-Sensitivity Underwater Acoustic Multimedia Communication Devices with Thick Composite PZT Films

<div>(a) Schematic cross section illustration of hydrophone using epitaxial SiO<sub>2</sub>/top electrode/PZT/ZnO/bottom electrode/SiO<sub>2</sub>/Si heterojunction structure. (b) Schematic of this study proposed hydrophone array with 8 × 8 elements.</div>

Journal of Sensors

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Figure 1

Figure 1: Fabrication and Characterization of High-Sensitivity Underwater Acoustic Multimedia Communication Devices with Thick Composite PZT Films 