Table of Contents Author Guidelines Submit a Manuscript
Journal of Sensors
Volume 2017, Article ID 7861025, 14 pages
https://doi.org/10.1155/2017/7861025
Research Article

Digital Closed-Loop Driving Technique Using the PFD-Based CORDIC Algorithm for a Biaxial Resonant Microaccelerometer

Bo Yang,1,2 Lei Wu,1,2 Binlong Wang,1,2 and Qiuhua Wang1,2

1School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China
2Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China

Correspondence should be addressed to Bo Yang; moc.361@20022002obgnay

Received 19 June 2017; Revised 18 September 2017; Accepted 27 September 2017; Published 26 October 2017

Academic Editor: Francesco Dell’Olio

Copyright © 2017 Bo Yang et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. S. Sung, J. G. Lee, B. Lee, and T. Kang, “Design and performance test of an oscillation loop for a MEMS resonant accelerometer,” Journal of Micromechanics and Microengineering, vol. 13, no. 2, pp. 246–253, 2003. View at Publisher · View at Google Scholar · View at Scopus
  2. S. Sung, J. G. Lee, and T. Kang, “Development and test of MEMS accelerometer with self-sustatined oscillation loop,” Sensors and Actuators A: Physical, vol. 109, no. 1-2, pp. 1–8, 2003. View at Publisher · View at Google Scholar · View at Scopus
  3. J. Zhao, G. Xia, Y. Zhao, A. Qiu, and Y. Su, “A Low Power MEMS-ASIC Silicon Resonant Accelerometor with Sub-ug Bias Instability and 30g Full-scale,” in IEEE International Symposium on Inertial Sensors and Systems, pp. 46–49, California, USA, 2016. View at Publisher · View at Google Scholar · View at Scopus
  4. D. H. Zhai, D. C. Liu, C. H. He et al., “A resonnat accelerometer based on ring-down measurement,” in Proceedings of the 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS, pp. 1125–1128, Alaska, USA, 2015. View at Publisher · View at Google Scholar · View at Scopus
  5. S. A. Zotov, B. R. Simon, A. A. Trusov, and A. M. Shkel, “High Quality Factor Resonant MEMS Accelerometer with Continuous Thermal Compensation,” IEEE Sensors Journal, vol. 15, no. 9, pp. 5045–5052, 2015. View at Publisher · View at Google Scholar · View at Scopus
  6. C. Comi, A. Corigliano, G. Langfelder, A. Longoni, A. Tocchio, and B. Simoni, “A Resonant microaccelerometer with high sensitivity operating in an oscillating circuit,” Journal of Microelectromechanical Systems, vol. 19, no. 5, pp. 1140–1152, 2010. View at Publisher · View at Google Scholar · View at Scopus
  7. U. Park, J. Rhim, J. U. Jeon, and J. Kim, “A micromachined differential resonant accelerometer based on robust structural design,” Microelectronic Engineering, vol. 129, no. C, pp. 5–11, 2014. View at Publisher · View at Google Scholar · View at Scopus
  8. R.-E. Hopkins and J.-T. Borenstein, “The silicon oscillating accelerometer: A MEMS inertial instrument for strategic missile guidance,” in The Missile Sciences Conference, pp. 45–51, 2000.
  9. B. Yang, H. Zhao, B. Dai, and X. Liu, “A new silicon biaxial decoupled resonant micro-accelerometer,” Microsystem Technologies, vol. 21, no. 1, pp. 109–115, 2014. View at Publisher · View at Google Scholar · View at Scopus
  10. S. Yamauchi and T. Watanabe, “All-digital MEMS tuning-fork self-excited vibration control by phase-relation using TAD-based ADPLL,” in Proceedings of the 13th IEEE International NEW Circuits and Systems Conference, NEWCAS, pp. 1–4, Grenoble, France, 2015. View at Publisher · View at Google Scholar · View at Scopus
  11. Y. Liu, C. He, D. Liu, Z. Yang, and G. Yan, “Digital closed-loop driver design of micromechanical gyroscopes based on coordinated rotation digital computer algorithm,” in Proceedings of the 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS, pp. 1145–1148, Suzhou, China, 2013. View at Publisher · View at Google Scholar · View at Scopus
  12. D. Senkal, E.-J. Ng, V. Hong, and Y. Yang, “Parametric drive of a toroidal MEMS rate integrating gyroscope demonstrating < 20 PPM scale factor stability,” in IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 28, Estoril, Portugal, 2015.
  13. Z. Yang, X. Jin, H. Ma, and Z. Jin, “CORDIC algorithm based digital detection technique applied in resonator fiber optic gyroscope,” Optical Fiber Technology, vol. 15, no. 3, pp. 328–331, 2009. View at Publisher · View at Google Scholar · View at Scopus
  14. C. Wu, B. Zhou, and J. Fang, “Research on improved CORDIC algorithm for high accuracy DDS signal source,” in Proceedings of the 4th International Conference on Computer Science and Network Technology, ICCSNT, pp. 1351–1355, Harbin, China, 2015. View at Publisher · View at Google Scholar · View at Scopus
  15. H.-J. Hsu and S.-Y. Huang, “A low-jitter ADPLL via a suppressive digital filter and an interpolation-based locking scheme,” IEEE Transactions on Very Large Scale Integration (VLSI) Systems, vol. 19, no. 1, pp. 165–170, 2011. View at Publisher · View at Google Scholar · View at Scopus
  16. X. Li, H. Li, and B. Yang, “The implementation of improved phase projection method in FPGA,” in Proceedings of the 2nd Annual Conference on Electrical and Control Engineering, ICECE, pp. 4146–4149, Yichang, China, 2011. View at Publisher · View at Google Scholar · View at Scopus