Research Article
Digital Closed-Loop Driving Technique Using the PFD-Based CORDIC Algorithm for a Biaxial Resonant Microaccelerometer
Table 2
The simulation parameters.
| | Parameter | Value | Parameter | Value |
| | (kg) | 3.750 × 10−8 | of PI_phase | 0.1500 | | (N⋅s/m) | 9.830 × 8−8 | of PI_phase | 0.2000 | | (N/m) | 926.8 | of PI_amp | 10.00 | | 3.890 × 106 | of PI_amp | 60.00 | | Fc of IIR1 or IIR2 (Hz) | 60.00 | (Torquer) | | | Static frequency (NCO) (Hz) | 2.510 × 105 | Frequency sensitivity (NCO) (Hz/V) | 1000 |
|
|
