Research Article
Digital Closed-Loop Driving Technique Using the PFD-Based CORDIC Algorithm for a Biaxial Resonant Microaccelerometer
Table 3
The system performance test results.
| | Test parameter (unit) | The conventional system
(-axis) | The optimized system
(-axis) |
| | Dynamic range (g) | ±10.00 | ±10.00 | | Scale factor (Hz/g) | 53.88 | 52.21 | | Zero bias (mg) | −23.00 | 4.020 | | Zero bias stability (μg) (Allan variance) | 532.7 | 100.1 | | Rate random walk (μg/) | 91.90 | 26.80 |
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