Study of the Photo- and Thermoactivation Mechanisms in Nanoscale SOI Modulator

Table 1

Comparison between nanometric and micrometric devices.

Parameter	SOIPAM; Microdevice; 1st generation	SOIPAM/TAM; Nanodevice 2nd generation	SOITAM; Nanodevice; 3rd generation
Substrate width	20 μm	20 μm	250 nm
Substrate length	28 μm	28 μm	65 nm
Substrate height	10 μm	10 μm	100 nm
V-groove length	10 μm	10 μm	100 nm
V-groove height	7.06 μm	7.06 μm	70 nm
BOX thickness	150 nm	150 nm	30 nm
Channel thickness	30 nm	30 nm	30 nm
Channel length	18 µm	300 nm	45 nm
Channel width	2 μm	2 μm	22 nm