Microfluidic Biosensor Based on Microwave Substrate-Integrated Waveguide Cavity Resonator

Figure 5

Three-step fabrication process for the SIW cavity resonator proposed as a biosensor. (a) Microstrip patch antenna is visualized. (b) SIW cavity is formed by inserting gold vias in the holes close to the patch boundary, and a big hole is drilled at the center of the patch and substrate to house the PDMS-based microwell. (c) PDMS-based microwell is aligned at the center of SIW cavity, and now, biomaterial is injected through a micropipette and (d) fabricated prototype of the SIW cavity resonator.

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(b)

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