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Journal of Sensors
Volume 2018, Article ID 1460582, 6 pages
Research Article

The Designing of Magnetic-Driven Micromirror for Portable FTIRs

1School of Software & Microelectronics, Northwestern Polytechnical University, Xi’an, Shaanxi, China
2School of Mechanical Engineering, Ryerson University, Toronto, ON, Canada

Correspondence should be addressed to Shaoxi Wang; nc.ude.upwn@gnawxhs

Received 26 September 2017; Revised 3 January 2018; Accepted 16 January 2018; Published 21 February 2018

Academic Editor: Paolo Bruschi

Copyright © 2018 Shaoxi Wang and Xuan Yuan. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Fourier transform infrared spectroscopy is a widely used instrument to analyze and test different materials including organic and inorganic. Most of current commercial Fourier transform infrared spectrometers are limited in miniaturization and scanning velocity by their macroscopic components. MEMS FTIR spectroscopy is one of the important applications of translational actuator-driven systems by using MEMS technology. The critical component in MEMS FTIRs is the large displacement translating micromirror and its actuator. The paper presents a large displacement and high-surface quality micromirror. The micromirror consists of a micromagnetic actuator and a micromirror plate. The mirror plate and the actuator are fabricated separately and bonded together afterwards, and its size is 3.6 × 3.6 mm2 high-surface quality square mirror plate and a 1cm2 moving part. The microactuator’s moving part is fabricated using MetalMUMPS, and its fixed part includes a ring permanent magnet and a solenoid to realize a large displacement. The mirror plate is fabricated using polished silicon coated with metal layer with high-surface prototypes that are fabricated and experimentally tested. A maximum stroke of 400 μm has been achieved in pull-in whereas only 140 μm stroke have been measured for a 4 to 5-volt DC-controlled displacement, and the resonance frequency is 10 Hz.