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Journal of Sensors
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2018
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Article
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Fig 1
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Research Article
Mechanical Characterization of Torsional Micropaddles Using Atomic Force Microscopy
Figure 1
SEM images of the micropaddle with (a) anchors at the centre (MP-1) and (b) anchors offset from the centre by 2.5
μ
m (MP-2).
(a)
(b)