Optimization of Electrostatic Force System Based on Newton Interpolation Method

Figure 4

Capacitance gradient measurement results. (a) Capacitance of 3 cycles with 6 steps. (b) Displacement of 3 cycles with 6 steps. (c) Capacitance calculation by NIM. (d) Capacitance-displacement curves for 60 cycles.

(a)

(b)

(c)

(d)