Optimization of Electrostatic Force System Based on Newton Interpolation Method

Table 1

Stiffness test results.

Type of cantilever	Nominal value of stiffness (N/m)	Typical value (N/m)	Measured value (N/m)	Standard deviation (N/m)	Relative (%)
NSG01	1.45–15.1	5.1	1.426976	0.00614	0.430
NSG10	3.1–37.6	11.8	15.26733	0.06171	0.404
NSG20	28–91	48	26.46524	0.05269	0.199
TESP	/	42	12.83741	0.07352	0.573