Optimization of Electrostatic Force System Based on Newton Interpolation Method

Table 2

Uncertainty budget for cantilever calibration.

Type of cantilever	Displacement (%)	Force (%)	Contact position (%)	Repeatability (%)	Relative combined uncertainty (%)
NSG01	0.03	1.3	1.2	0.4	1.8
NSG10	0.03	0.8	1.6	0.4	1.8
NSG20	0.12	0.8	1.7	0.2	1.9
TESP	0.12	0.8	0.7	0.6	1.2