Active Thermal Sensor for Improved Distributed Temperature Sensing in Haptic Arrays

Table 1

The properties of doped silicon and oxide used in the active sink.

	Silicon	Oxide
Thermal conductivity ()	130	1.38
Electrical resistivity (Ω·m)	0.00006	10e12
Temperature coefficient of resistance ()	0.0005	0
Specific heat ()	712	703
Density ()	2330	2200