Research Article

An Analytical Model for Bandwidth Enhancement of Air-Coupled Unsealed Helmholtz Structural CMUTs

Table 4

3-dB fractional bandwidth and SPL-bandwidth product of the Half case as shown in Figure 9.

Hole radius [µm]a=10a=20a=30a=40a=50no hole

fh [kHz]184.6277.1353.1422.6489.6=334.9
Separation between fp and fh [kHz]150.357.818.287.7154.7
3-dB fractional bandwidth5.4%10.9%24.0%14.7%6.5%1.3%
SPL-bandwidth product2.675.2911.066.082.620.67