An Analytical Model for Bandwidth Enhancement of Air-Coupled Unsealed Helmholtz Structural CMUTs

<table class="fixed-width table-group" id="tab5"><tr><td><table class="table"><colgroup><col style="width:6.71em"/><col style="width:4.94em"/><col style="width:5.04em"/></colgroup><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr><td class="align_left">Double case </td><td class="align_center">a=80µm</td><td class="align_center">a=120µm</td></tr><tr><td class="align_left">NMSE</td><td class="align_center">0.9173</td><td class="align_center">0.9347</td></tr><tr><td class="align_left" colspan="3"><hr/></td></tr><tr><td class="align_left">Standard case</td><td class="align_center">a=40µm</td><td class="align_center">a=60µm</td></tr><tr><td class="align_left">NMSE</td><td class="align_center">0.9355</td><td class="align_center">0.9513</td></tr><tr><td class="align_left" colspan="3"><hr/></td></tr><tr><td class="align_left">Half case</td><td class="align_center">a =20µm</td><td class="align_center">a=30µm</td></tr><tr><td class="align_left">NMSE</td><td class="align_center">0.9523</td><td class="align_center">0.9689</td></tr><tr class="table-tr"><td colspan="3"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

<div>Normalized mean square error (NMSE) values between analytical results and FEM results in Figure <a href="../fig10/">10</a>.</div>

Journal of Sensors

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Table 5

Table 5: An Analytical Model for Bandwidth Enhancement of Air-Coupled Unsealed Helmholtz Structural CMUTs 