Selected Aging Effects in Triaxial MEMS Accelerometers

Table 1

Maximal changes of the offsets.

Accelerometer	Parameter	Original value (V)	Absolute change (V)	Relative change
ADXL 330		1.5044	0.0063	0.42%
ADXL 330		1.5019	0.0020	0.13%
ADXL 330		1.5085	0.0030	0.20%
ADXL 327#1		1.4911	0.0034	0.23%
ADXL 327#1		1.4960	0.0047	0.32%
ADXL 327#1		1.5186	0.0045	0.30%
ADXL 327#2		1.4710	0.0057	0.39%
ADXL 327#2		1.4843	0.0042	0.28%
ADXL 327#2		1.5135	0.0059	0.39%