Selected Aging Effects in Triaxial MEMS Accelerometers

Table 2

Maximal changes of the scale factors.

Accelerometer	Parameter	Original value (V)	Absolute change (V)	Relative change
ADXL 330		0.3020	0.0004	0.14%
ADXL 330		0.3000	0.0006	0.20%
ADXL 330		0.2938	0.0005	0.16%
ADXL 327#1		0.4126	0.0005	0.12%
ADXL 327#1		0.4088	0.0009	0.23%
ADXL 327#1		0.4109	0.0005	0.12%
ADXL 327#2		0.4177	0.0005	0.11%
ADXL 327#2		0.4149	0.0005	0.12%
ADXL 327#2		0.4175	0.0005	0.13%