Selected Aging Effects in Triaxial MEMS Accelerometers

Table 3

Absolute and relative maximal errors of the measured acceleration.

Accelerometer	Acceleration			δgX..Z
ADXL 330		0.0243	0.81%	2.18%
ADXL 330		0.0126	0.42%	0.86%
ADXL 330		0.0115	0.38%	1.03%
ADXL 327#1		0.0152	0.51%	0.92%
ADXL 327#1		0.0243	0.81%	1.39%
ADXL 327#1		0.0197	0.66%	1.21%
ADXL 327#2		0.0220	0.73%	1.42%
ADXL 327#2		0.0178	0.59%	1.10%
ADXL 327#2		0.0238	0.79%	1.50%