Fabrication of a Piezoresistive Barometric Pressure Sensor by a Silicon-on-Nothing Technology

<figure class="figure-group responsive"><div class="sub-figure" id="a"><object data="https://static-02.hindawi.com/articles/js/volume-2019/5408268/figures/5408268.fig.0010a.svgz" name="5408268.fig.0010a" type="image/svg+xml"></object><div class="fig-label">(a) The membrane over sealed cavity after annealing</div></div><div class="sub-figure" id="b"><object data="https://static-02.hindawi.com/articles/js/volume-2019/5408268/figures/5408268.fig.0010b.svgz" name="5408268.fig.0010b" type="image/svg+xml"></object><div class="fig-label">(b) The membrane over sealed cavity after epitaxial growth</div></div><div class="sub-figure" id="c"><object data="https://static-02.hindawi.com/articles/js/volume-2019/5408268/figures/5408268.fig.0010c.svgz" name="5408268.fig.0010c" type="image/svg+xml"></object><div class="fig-label">(c) SEM view of the fabricated piezoresistive sensor</div></div></figure>

<p>SEM picture of the process. (a) The cross-section of the silicon membrane, (b) the sealed vacuum cavity, and (c) the piezoresistive sensor.</p>

Journal of Sensors

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Figure 10

Figure 10: Fabrication of a Piezoresistive Barometric Pressure Sensor by a Silicon-on-Nothing Technology 