Fabrication of a Piezoresistive Barometric Pressure Sensor by a Silicon-on-Nothing Technology

Figure 10

SEM picture of the process. (a) The cross-section of the silicon membrane, (b) the sealed vacuum cavity, and (c) the piezoresistive sensor.

(a) The membrane over sealed cavity after annealing

(b) The membrane over sealed cavity after epitaxial growth

(c) SEM view of the fabricated piezoresistive sensor