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Journal of Sensors
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2019
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Article
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Fig 14
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Research Article
Fabrication of a Piezoresistive Barometric Pressure Sensor by a Silicon-on-Nothing Technology
Figure 14
Comparison between SON and Cavity-SOI. (a) Zero-point output, (b) span, (c) TCO, and (d) TCS.
(a)
(b)
(c)
(d)