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Journal of Sensors
/
2019
/
Article
/
Tab 1
/
Research Article
Fabrication of a Piezoresistive Barometric Pressure Sensor by a Silicon-on-Nothing Technology
Table 1
Longitudinal and transverse piezoresistive coefficients in different directions [
3
].
Direction of Stress
Direction of Current
Type
Piezoresistive
Coefficient
Longitudinal
Transverse
Longitudinal
Transverse
Longitudinal